Hexamethyldisilazane
Hexamethyldisilazane (CAS: 999-97-3), also known as HMDS, is an organosilicon silylating reagent supplied as a clear liquid. Its trimethylsilyl groups enable surface modification and chemical derivatization. In semiconductor photolithography, it promotes photoresist adhesion on silicon wafers. Other applications include hydrophobizing silica and inorganic powders, improving filler dispersion and compatibility in polymer systems, and supporting silicone rubber and specialty chemical manufacture. Analytical laboratories use it for derivatization in gas chromatography/mass spectrometry. The material is moisture-sensitive and flammable and requires corresponding handling and storage controls.
• In semiconductor photolithography, HMDS conditions silicon wafer surfaces to improve adhesion between the substrate and photoresist, supporting reliable pattern transfer.
• As a surface-treatment agent, it hydrophobizes silica and other inorganic powders, helping improve filler dispersion and compatibility in polymer, coating, sealant, and composite systems.
• In analytical chemistry, HMDS acts as a derivatization reagent for gas chromatography and GC/MS, modifying polar analytes to support chromatographic analysis.
• Its silylating action is also used in chemical synthesis, including functional-group protection and the manufacture of silicone rubber and specialty intermediates.
Product Name: Hexamethyldisilazane
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