Diphenyl 4-tertbutylphenylsulfonium nonafluorobutanesulfonate
This compound (CAS 258872-05-8), also abbreviated TBPDPS-PFBS, is a triarylsulfonium salt in which a diphenyl(4-tert-butylphenyl)sulfonium cation is paired with the nonafluorobutanesulfonate anion, sometimes written as (4-(tert-butyl)phenyl)diphenylsulfonium 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate. It is a white to off-white solid that is thermally stable and soluble in the organic solvents used for photoresist formulations, and it is stored sealed and dry
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